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MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Material type: TextTextPublication details: Boston : McGraw-Hill, c2002.Description: xii, 436 p. : ill. ; 24 cmISBN:
  • 0072393912 (alk. paper)
Subject(s): DDC classification:
  • 621.381 HSU 22
LOC classification:
  • TK7874 .H794 2002
Online resources:
Item type: Books
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Includes bibliographical references (p. 427-431) and index.

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