Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.

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Material type: Text

TextSeries: Springer series in electrophysics ; v. 11Publication details: Berlin: New York: Springer-Verlag, 1983.Description: x, 556 p. : ill. ; 24 cmISBN:

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Current library	Collection	Call number	Copy number	Status	Notes	Barcode
Main Library Open Shelves	NFIC	621.3815 ION (Browse shelf(Opens below))	001	Available	Materials available in hard copy.	bsu26060259

Includes bibliographical references and index.

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